E-beam-based tool options grow for mask repair

摘要

San Jose, Calif. — New tools based on electron-beam and nanomachining technologies are coming to the mask repair market, complementing traditional tools based on focused ion beams and lasers . Vendors are scrambling to develop the technologies for 65-nanometer mask repair. Rival mask repair tool vendors FBI Co. and SII NanoTechnology are separately entering the e-beam market with combination or standalone systems. Nawotec GmbH (Rossdorf, Germany) entered the mask repair market with an e-beam tool in April and counts Intel as an early customer.