Study of CCD Transport on CMOS Imaging Technology: Comparison Between SCCD and BCCD, and Ramp Effect on the CTI

摘要

This paper presents measurements performed on charge-coupled device (CCD) structures manufactured on a deep micrometer CMOS imaging technology, in surface channel CCD and in buried channel CCD mode. The charge transfer inefficiency is evaluated for both CCD modes with regard to the injected charge, and the influence of the rising and falling time effect is explored. Controlling the ramp and especially reducing its abruptness allows to get much lower charge transfer inefficiency in buried CCD mode. On the contrary, we did not observe any effect of the ramp on surface channel CCD mode because of the presence of interface traps at the silicon–oxide interface.