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Research on laser-assisted selective metallization of a 3D printed ceramic surface

机译:3D印刷陶瓷表面激光辅助选择性金属化研究

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摘要

In recent years, the question of how to fabricate conductive patterns on complex ceramic surfaces in a high-definition and low-cost manner has been an increasing challenge. This paper presents a complete process chain for the selective metallization of Al _(2) O _(3) ceramic surfaces based on 3D printing. Laser pre-activation (LPA) is used to “activate” the surface of the ceramic substrate, and then, combined with the electroless copper plating (ECP) process, the Al _(2) O _(3) substrates can be metalized with preset patterns at room temperature, and a densely packed copper layer with high accuracy and good reproducibility can be obtained. The obtained coating has satisfactory roughness, excellent stability and bonding force, and good solderability. The resistivity of the copper layer measured using a four-probe resistance meter is about 3.1 mΩ cm. The limit line width of the metal circuit is about 33.2 μm. Finally, application cases of precision devices such as antennas with ceramic substrates are prepared. This study opens up a broader space for the design and manufacture of 3D microwave devices.
机译:近年来,如何以高清和低成本方式在复杂陶瓷表面上制造导电模式的问题一直是越来越大的挑战。本文介绍了基于3D打印的Al _(2)O _(3)陶瓷表面的选择性金属化的完整过程链。激光预激活(LPA)用于“激活”陶瓷基板的表面,然后与无电镀铜(ECP)工艺组合,Al _(2)O _(3)衬底可以金属化在室温下预设图案,可以获得具有高精度和良好再现性的密集包装的铜层。所得涂层具有令人满意的粗糙度,优异的稳定性和粘合力,以及良好的可焊性。使用四探针电阻计测量的铜层的电阻率为约3.1mΩcm。金属电路的极限线宽约为33.2μm。最后,制备了诸如具有陶瓷基板的天线的精密装置的应用案例。本研究为3D微波器件的设计和制造开辟了更广泛的空间。

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