Hydrogen can be released during the thermal decomposition of organic materials, therefore, monitoring its level in the working industrial high-voltage transformer oil allows you to identify the development of degenerative processes in advance, because these processes can lead to an accident in the future. In experiments has shown that highly sensitive and small-sized field effect gas sensor based on the metal-insulator-semiconductor structure can be used for measuring of Hydrogen in oil with direct contact of its structure with transformer oil. Given the harsh environmental conditions of hydrogen measurement the field effect capacity type gas sensor were fabricated by using laser micromilling technique for fabrication compact ceramic surface mounting device package and microheater for sustentation working temperature of metal-insulator-semiconductor structure.
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