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Electrical characteristics of top contact pentacene organic thin film transistors with SiO2 and poly(methyl methacrylate) as gate dielectrics

机译:顶部接触五烯有机薄膜晶体管用SiO2和聚(甲基丙烯酸甲酯)作为栅极电介质的电气特性

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Organic thin film transistors (OTFTs) were fabricated using pentacene as the active layer with two different gate dielectrics, namely SiO2 and poly(methyl methacrylate) (PMMA), in top contact geometry for comparative studies. OTFTs with SiO2 as dielectric and gold deposited on the rough side of highly doped silicon (n+ -Si) as gate electrode exhibited reasonable field effect mobilities. To deal with poor stability and large leakage currents between source/drain and gate electrodes in these devices, isolated OTFTs with reduced source/drain contact area were fabricated by selective deposition of pentacene on SiO2/PMMA through shadow mask. This led to almost negligible leakage currents and no degradation in electrical performance even after 14 days of storage under ambient conditions. But, the field effect mobilities obtained were lower than 10-3 cm2 V-1 s-1, whereas by using PMMA as gate dielectric with chromium deposited on the polished side of n+ -Si as gate electrode, improved field effect mobilities ( 0.02 cm2 V-1 s-1) were obtained. PMMA-based OTFTs also exhibited lower leakage currents and reproducible output characteristics even after 30 days of storage under ambient conditions.
机译:使用五烯烯作为有源层制造有机薄膜晶体管(OTFTS),作为具有两个不同的栅极电介质,即SiO 2和聚(甲基丙烯酸甲酯)(PMMA)的活性层,用于比较研究的顶部接触几何形状。具有SiO2的otfts作为沉积在高度掺杂硅(n + -si)的粗略侧的电介质和金作为栅极电极表现出合理的场效应迁移率。为了处理这些装置中的源极/漏极和栅电极之间的稳定性和大的漏电流,通过荫罩选择性沉积五烯酮,通过荫罩通过荫罩选择性沉积五烯酮的源/漏接触面积的隔离OTFT。即使在环境条件下储存14天后,这导致几乎可以忽略不计的漏电流,并且在电气性能下没有降解。但是,所获得的场效应迁移率低于10-3cm 2 V-1 S-1,而通过使用PMMA作为栅极电介质,铬沉积在N + -SI的抛光侧,作为栅电极,改善的场效应迁移(> 0.02得到CM2 V-1 S-1)。即使在环境条件下储存30天后,PMMA的OTFT也表现出较低的漏电流和可再现的输出特性。

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