Combined Reduced Phase Dual-Directional Illumination Digital Holography and Speckle Displacements for Shape Measurement

摘要

We present a digital holographic method to increase height range measurement with a reduced phase ambiguity using a dual-directional illumination. Small changes in the angle of incident illumination introduce phase differences between the recorded complex fields. We decrease relative phase difference between the recorded complex fields 279 and 139 times by changing the angle of incident 0.5° and 1°, respectively. A two cent Euro coin edge groove is used to measure the shape. The groove depth is measured as ≈300??μm. Further, numerical refocusing and analysis of speckle displacements in two different planes are used to measure the depth without a use of phase unwrapping process.