Shape Measurement Based on Combined Reduced Phase Dual-Directional Illumination Digital Holography and Speckle Displacements

摘要

We present a dual-directional illumination digital holographic method to increase height range measurement with a reduced phase ambiguity. Small change in the illumination angle of incident introduce phase difference between the recorded complex fields. We decrease relative phase difference between the recorded complex field 279 and 139 times by changing the angle of incident 0.5° and 1°, respectively. A two cent Euro coin edge groove is used to measure the shape. The groove depth is measured as ≈ 300μm. Further, numerical re-focusing and analysis of speckle displacements in two different planes are used to measure the depth without a use of phase unwrapping process.