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首页> 外文期刊>Bulletin of the American Physical Society >APS -APS March Meeting 2017 - Event - Study of low-temperature resistivity minimum and Hall Effect in pulsed laser deposited single crystalline titanium nitride (TiN) films
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APS -APS March Meeting 2017 - Event - Study of low-temperature resistivity minimum and Hall Effect in pulsed laser deposited single crystalline titanium nitride (TiN) films

机译:APS -APS 2017年3月会议-活动-脉冲激光沉积单晶氮化钛(TiN)薄膜的低温电阻率最小值和霍尔效应研究

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Titanium nitride (TiN) films were grown by a pulsed laser deposition technique using a variety of deposition parameters such as substrate temperature, ambient gas pressure, target-substrate distance, substrate materials, etc. The TiN thin films fabricated at temperatures in the range of 500-800 $^{circ}$ C in vacuum ambient are found to be epitaxial with (111) orientation. Low-temperature transport properties were systemically in TiN films with different room temperature resistivities (100-500 $mu $ohm-cm) under an applied magnetic field from 0 to 5.0 T. The temperature dependence of resistivity shows a generally minimum behavior at low temperatures (Textless 40 K) under various applied fields. Best fittings were made by considering both the electron-electron (e-e) interactions in terms of T$^{1/2, }$dependence and the Kondo-like spin dependent scattering in terms of ln T dependence. The Hall measurements and data analysis have shown that the charge carriers are electron in metallic TiN films. For example, the Hall coefficient and electron density at 300 K were found to be -6.4$imes$ 10$^{-5, }$cm$^{3}$/C and 9.7 $imes$ 10$^{22}$/cm$^{3}$, respectively.
机译:氮化钛(TiN)膜是通过脉冲激光沉积技术使用各种沉积参数(例如衬底温度,环境气压,目标衬底距离,衬底材料等)生长而成的。发现在真空环境中500-800℃是(111)取向的外延。在不同的室温电阻率(100-500μmu$ ohm-cm)的TiN薄膜中,在0到5.0 T的施加磁场下,系统地具有低温传输特性。电阻率的温度依赖性通常显示出在低温下的最小行为(无文字40 K)在各种应用领域下。最佳拟合是通过考虑T $ ^ {1/2,} $依赖关系的电子-电子(e-e)相互作用以及根据ln T依赖关系的类似Kondo的自旋依赖散射来做出的。霍尔测量和数据分析表明,电荷载流子是金属TiN薄膜中的电子。例如,在300 K处的霍尔系数和电子密度为-6.4 $ imes $ 10 $ ^ {-5,} $ cm $ ^ {3} $ / C和9.7 $ imes $ 10 $ ^ {22} $ / cm $ ^ {3} $。

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