Models of Structural Zones for Sputtered and Evaporated Thin Films.

摘要

ABSTRACT It is established that forming conditions and structural evolution of polycrystalline films may be simultaneously presented as structural zone models (SZM). The paper analyzed SZM of the films deposited by DC magnetron sputtering in inert and reactive media, by RF magnetron sputtering, and cathodic arc evaporation. The structural evolution of films in SZM is studied as a function of temperature, technological and physical parameters of the deposition process: a relation of the substrat.