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Emission Characteristics of the Gas Jet Assisted Glow Discharge for Direct Solid Analysis: Preliminary Studies I

机译:直接固体分析用气体喷射辅助辉光放电的排放特性:初步研究I

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The gas jet enhanced glow discharge system for direct solid analysis has been designed and constructed in our laboratory. Contrary to the conventional glow discharge, the laminar flow of argon gas through the 0.5 mm gap impacts a surface of solid sample. In addition, a needle valve is placed between a glow discharge cell and a vacuum pump to control the pressure of a glow discharge cell. As a result, the pressure could be precisely controlled without changing the flow rate of argon gas. Due to the presence of laminar flow of argon gas onto the surface of the sample, the analytical performances are quite different from those observed in a conventional glow discharge system. Emission behaviors of resonance and non-resonance lines for Cu, Zn and Ar are mainly discussed. In this report, the preliminary experimental results including emission characteristics and sputtering efficiency are presented.
机译:用于直接固体分析的气体喷射增强型辉光放电系统已在我们的实验室中设计和建造。与传统的辉光放电相反,穿过0.5毫米间隙的氩气层流会冲击固体样品的表面。另外,针阀放置在辉光放电室和真空泵之间以控制辉光放电室的压力。结果,可以在不改变氩气流量的情况下精确地控制压力。由于存在氩气层流到样品表面,分析性能与常规辉光放电系统中观察到的性能完全不同。主要讨论了Cu,Zn和Ar的共振线和非共振线的发射行为。在这份报告中,提出了包括发射特性和溅射效率在内的初步实验结果。

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