Fabrication of Sm-Based Perovskite-Type Oxide Thin-Films and Gas Sensing Properties to Acetylene

摘要

Sm-based perovskite-type oxide (SmMeO3: Me = Cr, Mn, Fe, Co) thin-films could be synthesized by a wet-chemical method using an acetylacetone—Poly(Vinyl Pyrrolidone) (PVP) polymeric precursor method at 750℃. The perovskite-type oxide thin-films were tried to apply an acetylene gas sensor based on AC impedance spectroscopy. Among the oxides tested, SmFeO3 thin-film sensor showed good sensor responses in which the AC impedance at 20 kHz was depending on acetylene gas concentration between 2 ppm and 80 ppm at 400℃.