Ion-beam chemical-thermal treatment of aluminum

摘要

The paper reports on a study of A7 aluminum alloy exposed to thermochemical treatment with a nitrogen ion beam produced in a source based on a non-self-sustained hollow-cathode glow discharge. The material was placed in a plasma generated by a source with a thermionic and hollow cathodes and simultaneously treated by accelerated ions and neutrals of the working gas. No negative bias was used, allowing dielectric surface treatment with no cathode spots. The ion charge at the treated surface was compensated by electrons from the plasma. The specimen temperature was maintained independent of the ion beam energy and current using an active screen whose temperature was controlled by applying a negative bias. The method provides the formation of a nitride film on the Al surface.