Directed Self-Assembly of Cage Silsesquioxane Containing Block Copolymers via Graphoepitaxy Techniques

摘要

Block copolymers (BCPs) consist of two or more chemically distinct polymer chains covalently bonded at one end. Immiscible segments in the blocks spontaneously induce to create microphase-separated nanostructures with periodic features of spherical, cylindrical or lamellar microdomains of the length ranging from approximately 5 to 50 nm, which can be controlled by the volume fraction and molecular weight of the blocks [1]. Recently, BCP thin films have attracted a great interest because the features of oriented and aligned microdomains can provide a potential application of nanolithography asa variety of patterned templates such as a high density data storage, photonics, sensors, catalysts and tissue engineering etc [2]