The Effect of Mg Dopant and Oxygen Partial Pressure on Microstructure and Phase Transformation ofZnTiO3Thin Films

摘要

Mg-doped zinc titanate (ZnTiO3) films were prepared using RF magnetron sputtering. Subsequent annealing of the as-deposited films was performed at a temperature ranging from 600 to900∘C for 2 hours with a heating rate of5∘C/min in air. It was found that the as-deposited films were amorphous and contained 2.77 at.% magnesium. This was further confirmed by the onset of crystallization that took place at annealing temperatures of600∘C. The results showed that single Zn2Ti3O8phase was existed at600∘C. When annealing is at700∘C, the results revealed that mainly a hexagonal ZnTiO3phase accompanying a Zn2Ti3O8minor phase was observed. When annealing is at900∘C, the results showed that single hexagonal ZnTiO3phase is stable at900∘C. It means that ZnTiO3phase containing no Mg is unstable at900∘C and is decomposed from hexagonal ZnTiO3to cubic Zn2TiO4and rutile TiO2at900∘C. In addition, the effect of oxygen partial pressure for the films deposited on the phase transformations and microstructures of zinc titanites thin film was investigated.