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Large Scale Ultrafast Laser Micro Texturing with Multi-Beams

机译:大型多束超快激光微织构

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Today ultrashort pulse lasers (USP lasers) are already widely used to realize highly precise micro-structures directly in nearly any material. Despite of today’s availability of high power ultrashort pulse lasers (up to several hundred watts), it is still a challenge to structure large surface areas, as required on embossing rollers, within an acceptable processing time for industrial production. A newly developed high compact ps-laser with repetition rates of up to 8MHz and an average power of up to 500W was distributed into 8 parallel beamlets by a diffractive optical element (DOE). Each of the single beams in the array is controlled by an acousto optical modulator (AOM). The beam array was focused on a cylinder surface with spot sizes of 10μm. Based on this initial set up, a further improved optical systems with 16 single beams has been designed to increase ablation speed and productivity. The beams have a distance of 20μm (8 beamlets) respective 80μm (16 beamlets) from spot to spot. Integrated in an ultra-high precision cylinder engraving system, the spots were synchronized with a precision of 1μm. Different functional surface geometries have been realized on an embossing roller as a master, which is used for the replication of the structures in roll-to-roll (R2R) processes. With this setup, functional structures as e.g. reduction in friction, improved soft touch or light guiding elements can be generated on large surfaces within short pro-cessing times.
机译:如今,超短脉冲激光器(USP激光器)已被广泛用于直接在几乎所有材料中实现高精度的微结构。尽管当今已经有大功率超短脉冲激光器(高达几百瓦)可用,但要在压花辊上要求的大面积加工结构以在可接受的工业生产时间内加工仍然是一个挑战。通过衍射光学元件(DOE)将具有高达8MHz的重复频率和高达500W的平均功率的最新开发的高密度ps激光器分配到8个平行子束中。阵列中的每个单光束由声光调制器(AOM)控制。光束阵列聚焦在光斑尺寸为10μm的圆柱表面上。基于此初始设置,已设计出具有16个单光束的进一步改进的光学系统,以提高烧蚀速度和生产率。光束之间的距离分别为20μm(8个子束)和80μm(16个子束)。集成在超高精度圆柱雕刻系统中,使斑点同步,精度小于1μm。已经在压花辊上作为母版实现了不同的功能表面几何形状,用于在卷对卷(R2R)过程中复制结构。通过这种设置,功能结构例如减少摩擦,可以在短时间内在较大的表面上产生改善的柔软触感或导光元件。

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