Femtosecond Laser Processing System with Target Tracking Feature

摘要

femtosecond laser processing system with a target tracking feature was developed. The block matching method based on a sum-of-squared-difference metric was used to measure the transverse movement of a target. Surface position was detected with an astigmatic sensor to measure the axial movement. The maximum tracking speeds of the target in the transverse and axial directions were 150 and 100 |ìm/s, respectively. A square traveling sample and an inclined sample were processed.