(Technical Communication) Fabrication of Microstructure Arrays on Photosensitive Glass by Femtosecond Laser

摘要

A maskless technique for the fabrication of U-shaped microstructure arrays on the surface of photosensitive glass by femtosecond laser-induced modification is developed. This technique is fol-lowed by heat treatment to crystallize the modified area, and the specimen is then placed in acid so-lution for chemical etching. The surface roughness of the microstructures is further improved by a secondary annealing process. The fabricated photosensitive glass is used as a mold template, and replicated plano-convex cylindrical arrays by UV-replica are also presented. The focusing ability of the microlens arrays on the glass mold and replicate is demonstrated.