Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO<SUB>2</SUB> Structure

Dmitry Polyakov; Albert Skvortsov; Vadim Veiko

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Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO₂ Structure

机译：脉冲光纤激光辐射对Si / SiO _{2 结构表面形貌和电学性能的影响}

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The regularities of microrelief formation on the surface of Si/SiO2 structure under the action of pulsed fiber laser radiation with intensity lower than SiO2 damage threshold are studied. Obtained surface morphology modification accompanied with changes in capacitance-voltage characteristics of modified area.

机译：研究了强度低于SiO 2破坏阈值的脉冲光纤激光辐射在Si / SiO 2结构表面形成微浮雕的规律。获得的表面形态修饰伴随着修饰区域的电容-电压特性的变化。

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《Journal of Laser Micro/Nanoengineering》 |2015年第3期|共5页
作者
Dmitry Polyakov; Albert Skvortsov; Vadim Veiko;
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中图分类光学;
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Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO2 Structure

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Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO₂ Structure