Influence of the key deposition control parameters on the structure of thin films in a direct current cold plasma reactor for photonics applications

摘要

Digest Journal of Nanomaterials and Biostructures Vol. 11, No. 4, October -December 2016, p. 1375-1382 INFLUENCE OF THE KEY DEPOSITION CONTROL PARAMETERS ON THE STRUCTURE OF THIN FILMS IN A DIRECT CURRENT COLD PLASMA REACTOR FOR PHOTONICS APPLICATIONS D. STAICU, B. BUTOI*, C. ARMEANU, E. S. BARNA Faculty of Physics, University of Bucharest, 405 Atomistilor Street, Mgurele, Romania Plasma polymerization is a method that uses plasma to initiate and sustain a polymerization process, the pol.