The ability of phase modulation enables liquid crystal spatial light modulator (LCSLM) to control wavefront. However, the disadvantage of its inherent nonlinear phase response will decrease the wavefront control accuracy. In this paper, a compensation for the nonlinear phase response is proposed based on Inverse Interpolation method. Characteristic curve of phase retardation versus gray levels for a 256x256 pixels phase-only LCSLM has been measured and calibrated by Inverse Interpolation. A mapping relationship between input gray levels and driving gray levels has been built and recorded by a linear look-up table ANTI2.LUT. The nonlinear error of the phase drops from 15.9% to 2.42% by using ANTI2.LUT. Further more, the mapping curve of ANTI2.LUT is almost consistent with 290.LUT from the manufacturer, which proved the efficiency of the compensation of phase nonlinearity. Finally, the distorted wavefront caused by a liquid crystal flake is corrected using LCSLM based on ANTI2.LUT. Experimental results show that the peak-valley value of the distorted wavefront decreases from 1.56l to 0.26l (l =0.6328 λm), the root-mean-square value decreases from 0.25l to 0.02l and the Strehl ratio of diffractive spots increases from 0.08 to 0.97. So LCSLM can be applied to realize high-precision and high-resolution wavefront correction with linear phase response.
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