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Development of Display-Type Ellipsoidal Mesh Analyzer

机译:显示型椭圆网格分析仪的开发

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We have been developing a new display-type ellipsoidal mesh analyzer (DELMA), which is composed of a wide acceptance angle electrostatic lens (WAAEL) unit and a transfer lens system. By using this analyzer, both photoelectron angular distribution patterns and magnified images of the sample can be obtained on a screen. When the screen is taken away from the electron path, the electrons are introduced to an energy analyzer (VG SCIENTA R4000) and high energy resolution spectra are obtained. A performance test of DELMA using synchrotron radiation was carried out at BL07LSU in SPring-8. We succeeded in measuring for the first time the magnified image of the sample, the angular distribution patterns, and x-ray photoelectron spectra. The magnified image from a mesh sample (SUS316, #100) was measured by using DELMA. The measured acceptance angle of angular distribution patterns using DELMA combined with the energy analyzer was about $±45°. We measured x-ray photoelectron spectra from a Ta plate to evaluate the energy resolution of DELMA. The measured total energy resolution of DELMA combined with the energy analyzer was 0.2% at kinetic energy around 700 eV. [DOI: 10.1380/ejssnt.2011.311]
机译:我们一直在开发一种新型的显示型椭球网格分析仪(DELMA),该分析仪由一个宽接收角静电透镜(WAAEL)单元和一个转移透镜系统组成。通过使用该分析仪,可以在屏幕上同时获得光电子角度分布图案和样品的放大图像。当屏幕从电子路径上移开时,会将电子引入能量分析仪(VG SCIENTA R4000),并获得高能量分辨率的光谱。在SPring-8的BL07LSU上进行了使用同步加速器辐射的DELMA性能测试。我们首次成功测量了样品的放大图像,角度分布图和X射线光电子能谱。通过使用DELMA测量来自网状样品(SUS316,#100)的放大图像。使用DELMA结合能量分析仪测得的角度分布图案的接受角约为$±45°。我们测量了Ta板的X射线光电子能谱,以评估DELMA的能量分辨率。在700 eV左右的动能下,与能量分析仪结合使用的测得总能量分辨率为0.2%。 [DOI:10.1380 / ejssnt.2011.311]

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