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A review of few unconventional machining processes based on the concept of velocity shear instability in plasma

机译:基于等离子体中速度剪切不稳定性概念的几种非常规加工方法的综述

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In this article, published work on unconventional machining process, plasma spray process, plasma etching and abrasive jet machining has been summarized. In unconventional machining process, based on the concept of velocity shear instability in plasma, the material is removed from metallic surface by the impact of ions. Single-crystal silicon surface roughness (up to nanometer sizes) induced by gas plasma in plasma etching based on the concept of velocity shear instability in plasma has been achieved. The material removal from metallic surface can be explained on the basis of erosion phenomena. Momentum transfer from ions to abrasive particles accelerates micron-sized abrasive particles. In this process, material removal from metallic surfaces varies from a few milligrams to a few grams per second. Plasma spray process is based on the concept of velocity shear instability in plasma. In this process, heat generated in plasma and velocity of ions is used to develop high quality surface. Actually, the velocity of ions depend upon different parameters like magnetic field, homogenous D.C electric field, shear scale length, temperature anisotropy, heterogeneity in D.C electric field, density gradient, etc. Therefore, a combination of aforementioned parameters is selected to suit the requirement.
机译:在本文中,已总结了有关非常规加工工艺,等离子喷涂工艺,等离子蚀刻和磨料喷射加工的已发表工作。在非常规加工过程中,基于等离子中速度剪切不稳定性的概念,材料会通过离子的撞击从金属表面去除。基于等离子体中速度剪切不稳定性的概念,实现了等离子体蚀刻中气体等离子体引起的单晶硅表面粗糙度(最大为纳米尺寸)。可以根据腐蚀现象解释从金属表面去除材料的方法。从离子到磨料颗粒的动量传递会加速微米级的磨料颗粒。在此过程中,从金属表面去除材料的速度从每秒几毫克到几克不等。等离子喷涂过程基于等离子中速度剪切不稳定性的概念。在此过程中,等离子体中产生的热量和离子的速度用于形成高质量的表面。实际上,离子的速度取决于不同的参数,例如磁场,均匀的DC电场,剪切尺度长度,温度各向异性,DC电场的非均质性,密度梯度等。因此,选择上述参数的组合来满足要求。

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