Acetone Detection by Chemical Sensors Based on Tungsten and Titanium Oxide Nanowires

摘要

Tungsten and titanium oxide (WO3/Ti) nanowires (NWs) were grown by thermal oxidation of a tungsten and titanium alloy (WTi) metallic layer deposited on 2 ?? 2 mm2 alumina substrates by DC magnetron sputtering. Thermal oxidation was carried out in a custom evaporator chamber. Several parameters were controlled to achieve the optimal growth conditions. Morphological and structural analysis were performed on samples by a scanning electron microscope (SEM) and RAMAN spectroscopy, respectively. Nanowires, grown directly on the final transducer, were tested towards different gaseous species in a wide range of working temperatures. In this work, results obtained in presence of acetone are proposed.