Hybrid Micro Electro Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements

摘要

In this paper, we present a redundant micromachined sensor based on Bulk and Etch. Silicon-on-Insulator (BESOI) process for measurements of relative humidity (RH) by using Graphene-Oxide/Polyvinyl-Alcohol (GO/PVA) composite. The microsensor is a mechanical oscillator composed of a proof mass with multilayer of nanomaterials (GO/PVA) and suspended by four crab leg springs. The realized redundant approach concerns the possibility to use different readout strategies in order to estimate the same measurand: RH. This is an intriguing solution to realize a a??robust measurement systema??, with multiple outputs by using the GO/PVA as functional material. In presence of RH variation: (1) it changes its mass and; as consequence; a variation of the natural frequency of the oscillator can be observed in the frequency domain; (2) it also varies the conductivity which can be measured by using two integrated electrodes. The sensor has been designed; studied; modeled and experimental results demonstrate the effectiveness of our implementation.