Simulation and optimization of sensor based on Mach-Zehnder interferometer with reference waveguide

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Simulation and optimization of sensor based on Mach-Zehnder interferometer with reference waveguide

机译：基于Mach-Zehnder干涉仪和参考波导的传感器仿真与优化

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ThisworkpresentsthetheoreticalresultsregardingtheoptimizationofanintegratedMach-Zehnderinterferometernbsp;withacalibrationwaveguiderefractometerbasedonsiliconnitrideribwaveguideswithSU8cladding.Frommodelingandsimulationstudiesasensorstructurehasbeendesignedwhichpresentstolerationtofabricationerrorsandinputcouplingmisalignments.Theroleofthechromiumthinlayersectionsdeposedoversiliconnitridelayerisanalyzedinthisworkforalleviatingthemisalignmentcouplingerrorsandforimprovementofthemeasurementaccuracy,respectively.

机译：ThisworkpresentsthetheoreticalresultsregardingtheoptimizationofanintegratedMach-Zehnderinterferometernbsp; withacalibrationwaveguiderefractometerbasedonsiliconnitrideribwaveguideswithSU8cladding.Frommodelingandsimulationstudiesasensorstructurehasbeendesignedwhichpresentstolerationtofabricationerrorsandinputcouplingmisalignments.Theroleofthechromiumthinlayersectionsdeposedoversiliconnitridelayerisanalyzedinthisworkforalleviatingthemisalignmentcouplingerrorsandforimprovementofthemeasurementaccuracy，分别。

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《Optoelectronics and Advanced Materials-Rapid Communications》 |2013年第2013期|共页
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Simulation and optimization of sensor based on Mach-Zehnder interferometer with reference waveguide

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