Modeling and analysis of vibration-based MEMS piezoelectric energy harvester for green energy source

摘要

Thewirelesssensornetworkmarketisgrowingquicklyyetislimitedbyexistingshortlifetimebatteries.Providingagreen,virtuallyinfinitealternativepowersourcetotraditionalenergysourceswillsignificantlyexpandapplicationsforWirelessSensorNetworks(WSNs)andothertechnologies,theuseofpiezoelectricmaterialstocapitalizeontheambientvibrationssurroundingasystemisonemethodthathasseenadramaticriseinuseforpowerharvesting.Thesimplicityassociatedwiththepiezoelectricmicro-generatorsmakesitveryattractiveforMicro-Electro-MechanicalSystems(MEMS)applications,inwhichmechanicalvibrationsareharvestedandconvertedtoelectricenergy.Thesemicro-generatorsweredesignedasanalternativetoabattery-basedsolutionespeciallyforremotesystems.InthispaperweproposedadesignandsimulationofMEMS-basedenergyharvestedbyusingANSYSandCOVENTORWAREapproaches.TheimprovementsinexperimentalresultsobtainedinthevibrationbasedMEMSpiezoelectricenergyharvestersshowverygoodscopeforMEMSpiezoelectricharvestersinthefieldsofpowerMEMSandGreenTechnologyinthefuture.