Influence of nanoscale structural features on the physical properties of DC reactive magnetron sputtered Zinc Aluminum Oxide (ZAO) thin films for photovoltaic applications

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Influence of nanoscale structural features on the physical properties of DC reactive magnetron sputtered Zinc Aluminum Oxide (ZAO) thin films for photovoltaic applications

机译：纳米结构特征对直流电反应磁控溅射锌铝氧化物（ZAO）薄膜在光伏应用中物理性能的影响

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ZincAluminumOxide(ZAO)thinfilmsweredepositedonglasssubstratesbyDCreactivemagnetronsputteringtechnique.Studiesonstructural,morphological,electricalandopticalpropertieswithdifferentthicknessoffilmsarediscussedindetail.XRDpatternsexhibitsZAOthinfilmshadadiffractionpeakcorrespondingto(002)preferredorientationwithc-axisperpendiculartothesubstratesurface.TheopticalbandgapofnanostructuredZAOthinfilmsincreaseswithincreaseoffilmthicknessfrom3.41to3.51eV.ThecarrierconcentrationofZAOthinfilmsareintherangeof3.08x1020cm-3-nbsp;8.12x1020cm-3.

机译：ZincAluminumOxide（ZAO）thinfilmsweredepositedonglasssubstratesbyDCreactivemagnetronsputteringtechnique.Studiesonstructural，形态，electricalandopticalpropertieswithdifferentthicknessoffilmsarediscussedindetail.XRDpatternsexhibitsZAOthinfilmshadadiffractionpeakcorrespondingto（002）preferredorientationwithc-axisperpendiculartothesubstratesurface.TheopticalbandgapofnanostructuredZAOthinfilmsincreaseswithincreaseoffilmthicknessfrom3.41to3.51eV.ThecarrierconcentrationofZAOthinfilmsareintherangeof3.08x1020cm -3- NBSP; 8.12x1020cm-3。

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《Optoelectronics and Advanced Materials-Rapid Communications》 |2012年第2012期|共页
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Influence of nanoscale structural features on the physical properties of DC reactive magnetron sputtered Zinc Aluminum Oxide (ZAO) thin films for photovoltaic applications

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