Development of a compact and reliable repetitively pulsed Xe Cl (308 nm) excimer laser

摘要

Development and operation characteristics of a repetitively pulsed UV spark pre-ionized XeCl(Xenon Chloride) excimer laser is described. The laser uses discharge pumped C–C charge transfer excitation. A compact gas circulation loop was adopted to achieve high repetition rate operation. The laser generates optical pulses of energy 150 mJ at 150 Hz reliably. The electrical to optical conversion ef?ciency obtained is 1%. The laser pulse duration is ～8 nS (FWHM). The single ?ll gas lifetime have been found to be 2 × 10 6 shots for 20% reduction of energy without any halogen injection. The system is compact and reliable.