Packaged dual-band metasurface thermal emitters integrated with a resistive membrane heater were manufactured by ultraviolet (UV) nanoimprint lithography followed by monolayer lift-off based on a soluble UV resist, which is mass-producible and cost-effective. The emitters were applied to infrared CO2 sensing. In this planar Au/Al2O3/Au metasurface emitter, orthogonal rectangular Au patches are arrayed alternately and exhibit nearly perfect blackbody emission at 4.26 and 3.95 μm necessary for CO2 monitoring at the electric power reduced by 31%. The results demonstrate that metasurface infrared thermal emitters are almost ready for commercialization.
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机译：通过紫外线（UV）纳米压印光刻技术，然后基于可溶UV抗蚀剂的单层剥离技术，制造出了与电阻膜加热器集成在一起的封装式双波段超表面热辐射器，这是可批量生产且具有成本效益的。将发射器应用于红外CO 2 感测。在此平面Au / Al 2 O 3 / Au超表面发射器中，正交矩形Au斑块交替排列，并在CO <4.26和3.95μm处表现出近乎完美的黑体发射。 SUB> 2 监视下的电力减少了31％。结果表明，超表面红外热辐射器几乎已准备好商业化。
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