Effect of preparation condition on the optical properties of transparent conducting oxide based on zinc oxide

摘要

Thin films of Al_2ZnO_4 were prepared using DC sputtering technique at room temperature. One set of the films of different thicknesses were prepared under the same condition of preparation, another one was prepared under different rate of flow of argon, the last set was prepared under different pressure of the gas. The optical energy gap, Urbach tails, refractive index of the films, single oscillator energy and dispersion energy were studied. The effect of changing the condition of preparation on the optical constants was investigated.