Poly(dimethyl-siloxane) (PDMS) based micro-optical beam splitters

摘要

A micro‐optical beam splitter for integrated optical devices has been designed, fabricated andcharacterized. Two main configurations of the beam splitters are defined: 1×2 and 1×4. Thefabrication is based on soft‐lithography and requires a single photolithographic step for masterdefinition. The device is replicated in poly(dimethyl‐siloxane) (PDMS). Its working principle is basedon total internal reflection. Optical elements e.g., lenses, mirrors and beam splitters, based on PDMSand air as constituent materials are defined. A self alignment system for optical fibers has been alsofabricated. Losses of 7.8 ± 1.2 dB for a single beam division are obtained.