Transparent Coating Oxide - Indium Zinc Oxide as Conductive Coating: a Review

摘要

This paper reviews the transparent conductive oxide with emphasis on indium doped zinc oxide (TCO-IZO). TCO has been growing faster year by year, especially in semiconductor, solar devices and electronic field. There are many methods that can be used to produce IZO coating such as dip coating, sol-gel, magnetron sputtering, thermal evaporation and atomic layer deposition. IZO has gained significant attention for transparent electrodes due to its good electrical conductivity, high visible transmittance in the range from 400 to 900 nm, large work function, excellent surface smoothness, and low deposition temperature. Many studies have been done on the IZO coating onto glass substrate, but there is still less study on the low processing temperature substrates such as polymers and natural fibres. Parameters such as coating thickness, annealing temperature and number of cycles have to be considered in order to achieve the desired electrical conductivity and optical properties of IZO.