An informed choice of materials and manufacturing techniques enables devices that can take precision measurements in harsh environments. Paddy French at Delft University of Technology in The Netherlands and his Dutch university colleagues Gijs Krijnen and Fred Roozeboom review various approaches for constructing microsystems that can operate in extreme conditions without losing accuracy. Electronic devices are often required to take measurements in applications that subject them to high pressures, temperatures and humidities. Often, they should also be resilient against strong chemicals, radiation or physical shocks. In addition, medical devices must be biocompatible. The researchers consider the importance of the substrate material in ensuring that microsystems remain functional in extreme environments. They compare and contrast different technologies for processing such devices and describe techniques for packaging these systems so that they are protected from their surroundings.
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