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Electrohydrodynamic Direct-Writing Micropatterns with Assisted Airflow

机译:带辅助气流的电液动力学直接写入微图案

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Electrohydrodynamic direct-writing (EDW) is a developing technology for high-resolution printing. How to decrease the line width and improve the deposition accuracy of direct-written patterns has been the key to the promotion for the further application of EDW. In this paper, an airflow-assisted spinneret for electrohydrodynamic direct-writing was designed. An assisted laminar airflow was introduced to the EDW process, which provided an additional stretching and constraining force on the jet to reduce the surrounding interferences and enhance jet stability. The flow field and the electric field around the spinneret were simulated to direct the structure design of the airflow-assisted spinneret. Then, a series of experiments were conducted, and the results verified the spinneret design and demonstrated a stable ejection of jet in the EDW process. With assisted airflow, the uniformity of printed patterns and the deposition position accuracy of a charged jet can be improved. Complex patterns with positioning errors of less than 5% have been printed and characterized, which provide an effective way to promote the integration of microanosystems.
机译:电液动力学直接书写(EDW)是一种用于高分辨率打印的开发技术。如何减小线宽并提高直写图案的沉积精度一直是促进EDW进一步应用的关键。本文设计了一种气流辅助喷丝板,用于电动流体动力学直接书写。辅助层流被引入到EDW过程中,该过程为射流提供了额外的拉伸和约束力,以减少周围的干扰并增强射流的稳定性。模拟了喷丝头周围的流场和电场,以指导气流辅助喷丝头的结构设计。然后,进行了一系列实验,结果验证了喷丝头的设计并证明了在EDW工艺中射流的稳定喷射。借助辅助气流,可以改善印刷图案的均匀性和带电射流的沉积位置精度。定位误差小于5%的复杂图案已被印刷和表征,这为促进微/纳米系统的集成提供了有效的方法。

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