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首页> 外文期刊>Metrology and Measurement Systems: Metrologia i Systemy Pomiarowe >The Influence of Coating Fabrication Processes on the Optical Efficiency of Replicated Moiré Diffraction Gratings
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The Influence of Coating Fabrication Processes on the Optical Efficiency of Replicated Moiré Diffraction Gratings

机译:镀膜制造工艺对复制莫尔衍射光栅光学效率的影响

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One of the most important parameters in the study of diffraction gratings is their optical efficiency. This paper analyzes the different manufacturing processes to cover gratings of Moir?? interferometry and their influence on the quality and absolute efficiency of replicated gratings on the surfaces of specimens. The Moir?? interferometry is a field measurement technique that has been used in many different fields such as applied mechanics, microelectronics, biomechanics or micromechanics, hence the importance of this study. The applied reflected coating was done by sputtering and aluminium vaporization processes. In this work different materials and thickness layers were analyzed. The obtained coatings have a high degree of reflectivity on the replicated gratings.
机译:在衍射光栅研究中最重要的参数之一是其光学效率。本文分析了覆盖莫尔光栅的不同制造工艺。干涉测量法及其对样品表面复制光栅质量和绝对效率的影响。摩尔纹?干涉测量法是一种现场测量技术,已在许多不同领域中使用,例如应用力学,微电子学,生物力学或微力学,因此这项研究的重要性。所施加的反射涂层是通过溅射和铝蒸发工艺完成的。在这项工作中,分析了不同的材料和厚度层。所获得的涂层在复制的光栅上具有高度的反射率。

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