Resistance of Hydrogenated Titanium-Doped Diamond-Like Carbon Film to Hyperthermal Atomic Oxygen

摘要

The effect of irradiation by a hyperthermal-atomic-oxygen beam on hydrogenated titanium-doped diamond-like carbon (hydrogenated Ti-DLC) films, applied as a solid lubricant for equipment used in low-earth orbit was investigated. Unlike the film thickness of hydrogenated non-doped DLC films, that of hydrogenated Ti-DLC films was found to be constant after the films were exposed to atomic oxygen. In addition, bulk composition of the hydrogenated Ti-DLC film stayed constant, and in particular, hydrogen content in the film did not decrease. These results indicate that a hydrogenated Ti-DLC film can keep its low friction properties under vacuum. Surface chemical analysis showed that a titanium-oxide layer is form on the film by exposure to atomic oxygen. The thickness of the titanium oxide layer was estimated to be about 5 nm from the element distribution in the depth direction of the hydrogenated Ti-DLC films. The titanium-oxide layer was interpreted to protect the bulk film from erosion by hyperthermal atomic oxygen.