Technology Development to Measure Vertical Height and High Aspect Ratio Using Chromatic Confocal

摘要

Electronic parts are becoming small and thin parts are very precise and refined accordingly,requiring measurement of part shapes. In particular, parts structures that have high aspect ratio anddozens of millimeters high vertical resolution need to be measured in the 3D measurement area. Tomeasure 3D shape of high vertical resolution, the study suggested measuring technology withsynchronization of stage and chromatic confocal. It also suggested the chromatic confocal with high NAvalue to measure high aspect ratio structures with high slope and technology to measure the sample byinclining and fixing this. The suggestion would make real time 3D shape measurement possible of thesample with high vertical resolution and high aspect ratio without surface treatment. Convergence ofmeasurement probe would also enable shape measurement of nano-size structure surface in various fields.