Apparatus for chromatic confocal measurement of the local height and/or orientation of the surface of a sample and corresponding method for measuring the height or roughness of a sample

摘要

The present invention relates to a device (1) for chromatic confocal measurement of the local height and/or orientation of a surface (S) of a sample, said device comprising: a light source (2) configured to generate a polychromatic light beam (9) ), - a projection lens (4) comprising a lens (4) with axial chromatic aberration configured to apply the beam of light (9) to the surface (S) of the sample, - reflected by the surface (S) of the sample an optical sensor coupled to the projection lens (4) and configured to receive the light beam (9) and measure the total energy of the reflected light beam (9) received during the integration period, for the projection lens (4) a scanning system (10) configured to move the propagation axis of the light beam (9) so that the total energy measured by the optical sensor is equal to that of the light beam (9) reflected by the surface (S) of the sample Let it correspond to the dynamic spatial average of the total energy.