Mesoporous Silicon Layer as a Highly Sensitive Ethanol Sensor

摘要

Mesoporous silicon (PSi) layer was used to create highly sensitive, electrically-based sensor fordetection of liquid ethanol at room temperature. The PSi nanostructure that is generated in anelectrochemical etching of crystalline silicon in HF-based solution was 4.5 m thick with an averagepore size of 30 nm. The as-fabricated sensor exhibits highly sensitive, reversible response during thereal-time measurements of capacitance and conductance. Excellent repeatability of the devise wasobtained after six cyclic tests, demonstrating stability of the sensor. Long-term stability for the sensorperformance was also observed after four weeks storage. The observed response could be understoodin terms of the change in surface charge upon ethanol infiltration into the mesoporous structure.