High Sensitivity Multiple Gases Sensor With an Array of Micro-ring Resonators

摘要

A gas sensing system comprising an array of photonic wire waveguide-based ring resonators isproposed. As a ring resonator propagates resonant lights only, parameters of the resonator can bedeliberately designed such that a resonant light of the resonator is tuned with an absorption spectralline of a gas. Thus, an array of ring resonators can be used to select a series of resonant lights tunedwith spectral lines of multiple gases. Simulation results show that three gases, CH4, CO2, and HF forexample, are simultaneously detected by the system with high sensitivity. The gas sensing system canbe fabricated as compact and portable with current fabrication technology.