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Tunable Photonic Crystals Based on Electrochemically Etched Porous Silicon

机译:基于电化学腐蚀的多孔硅的可调谐光子晶体

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In this paper, porous silicon photonic crystals were simulated and fabricated as distributed Braggreflectors (DBRs), graded DBRs and Fabry-Perot (FP) filters. The transfer matrix method (TMM) wasused to model the propagation of light in the photonic crystal. The porous silicon photonic crystalswere fabricated by electrochemically etching p-type (100) silicon in 12% hydrofluoric acid solution.Applied currents of 20mA and 120mA were used to produce the varying refractive indices of thelayers. Distributed Bragg reflectors were tuned to have their central wavelength at 650nm, 700nm, and800nm while the FP filter optical cavity was tuned to 650nm. Results show the effective formation ofuniform and graded DBR with maximum gradation of 300nm. Simulation of DBR and FP reflectivityyielded a maximum of 2.51% and 0.37% deviation from the simulated values. Results show that theexperimental data was in good agreement with the simulated reflectivity at the different centralwavelengths. The paper has shown the ease and versatility in the fabrication of porous silicon asphotonic crystals.
机译:在本文中,多孔硅光子晶体被模拟并制造为分布式布拉格反射镜(DBR),渐变DBR和Fabry-Perot(FP)滤光片。传递矩阵法(TMM)用于模拟光在光子晶体中的传播。通过在12%的氢氟酸溶液中对p型(100)硅进行电化学刻蚀来制备多孔硅光子晶体。使用20mA和120mA的电流产生不同的折射率。将分布式布拉格反射器的中心波长调整为650nm,700nm和800nm,而将FP滤光器光学腔的波长调整为650nm。结果表明有效形成均匀且渐变的DBR,最大渐变为300nm。 DBR和FP反射率的模拟与模拟值的最大值相差2.51%和0.37%。结果表明,在不同的中心波长下,实验数据与模拟反射率吻合良好。该论文表明了多孔硅作为光子晶体的制造的简便性和多功能性。

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