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Polymer-based Photonic Crystal Cavity Sensor for Optical Detection in the Visible Wavelength Region

机译:基于聚合物的光子晶体腔传感器,用于可见波长区域的光学检测

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In this study, a polymer-based two-dimensional photonic crystal (PhC) cavity for visible-light-based optical-sensing applications was designed and fabricated for the first time. The PhC cavity configuration was designed to operate at 650 nm, and fabricated with a polymer (resist) on a silicon substrate using electron-beam lithography. For investigating sensing applications based on shifting of condition exhibiting a photonic bandgap (PBG), the polymer monolayer deposition (layer-by-layer method) was monitored as the light-intensity change at the cavity position. Consequently, the monolayer-level detection of polyions was achieved.
机译:在这项研究中,首次设计和制造了一种基于聚合物的二维光子晶体(PhC)腔,用于基于可见光的光学传感应用。 PhC腔配置被设计为在650 nm下运行,并使用电子束光刻技术在硅基板上用聚合物(抗蚀剂)制成。为了研究基于出现光子带隙(PBG)的条件变化的传感应用,监视聚合物单层沉积(逐层方法)作为腔位置处的光强度变化。因此,实现了对单离子的单层检测。

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