Simulations of acoustic waves bandgaps in a surface of silicon with a periodic hole structure in a thin nickel film

摘要

We have performed simulations of dispersion relations for surface acoustic waves in two-dimensional phononic crystal by the finite elements method (FEM) and by the plane wave method (PWM). Considered medium is a thin nickel layer on a silicon single crystal (001) surface. The nickel film is decorated with cylindrical holes of the depth equal to the nickel film thickness arranged in a square lattice. We have obtained full bandgaps for the surface waves propagating in the medium of particular range of filling factor and layer thickness. The width of the bandgap had reached over 500[MHz] for the sample of the lattice constant 500[nm] and is sufficient for experimental design.