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首页> 外文期刊>ACS Omega >Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films
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Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films

机译:单壁碳纳米管薄膜的晶圆级热泳干沉积

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We report the direct and dry deposition of transparent conducting films (TCFs) of aerosol-synthesized single-walled carbon nanotubes (SWNTs) using a thermophoretic precipitator (TP) designed for the uniform and efficient deposition of aerosol-synthesized nanomaterials on 50 mm wafers or similarly sized polymer substrates. The optical and electrical performance of the fabricated TCFs match or surpass the published results achieved using a filter-based collection of aerosol-synthesized SWNTs, and TCFs with sheet resistances of 60 Ω/sq. at 87.8% transmittance and 199 Ω/sq. at 96% transmittance on flexible polymer substrates are demonstrated. The precipitator design is immediately applicable in roll-to-roll fabrication of SWNT TCFs or other functional coatings of aerosol-synthesized nanomaterials.
机译:我们报告了使用热电泳除尘器(TP)直接和干法沉积气雾合成的单壁碳纳米管(SWNTs)的透明导电膜(TCFs),该技术用于在50毫米晶片上均匀有效地沉积气雾合成的纳米材料。尺寸相似的聚合物基材。制成的TCF的光学和电气性能与使用基于过滤器的气溶胶合成SWNT和薄层电阻为60Ω/ sq的TCF的收集结果达到或超过已发表的结果。在87.8%的透射率和199Ω/ sq。证明了在柔性聚合物基底上的透射率为96%。除尘器设计可立即应用于SWNT TCF的卷对卷制造或气溶胶合成的纳米材料的其他功能性涂层。

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