Decreasing Energy Costs in Epitaxial Growth from Gas Phase System by Optimization of Pressure

摘要

In this paper we introduce an approach to decrease energy costs during growth an epitaxial layers from gas phase by minimization velocity of flow of composition of gases (gas-carrier and materials in gas phase, which are used for formation epitaxial layer) after leaving epitaxial growth from gas phase system. As a result of minimization of the velocity one can obtain minimization of pressure of compressor and decreasing of energy cost of the epitaxial growth.