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Deformation and Cracking Mechanism in CrN/TiN Multilayer Coatings

机译:CrN / TiN多层涂层的形变和开裂机理

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In this study, the effects of the microstructural properties on the deformation and damage mechanism of CrN/TiN multilayer coatings deposited on Custom 450 steel using the unbalanced reactive magnetron sputtering PVD process were studied. All coatings were fabricated with an overall thickness of 1.5 μm, but different bilayer periods (Λ). Structural and mechanical properties of coatings were investigated by XRD analysis and nanoindentation experiment, respectively. Indentation tests at three loads of 100, 300, and 450 mN were performed on the coatings’ surface and then, cross-sections of fractured imprints were analyzed with SEM and TEM. Measuring the length of the cracks induced by indentation loads and analyzing the load-displacement curves, apparent fracture energy values of multilayer coatings were calculated. We observed that multilayer systems with bilayer periods of 4.5–15 nm possess superlattice structure, which also results in higher values for Young’s modulus and hardness as well as higher fracture energy. Comparison of cross-sectional SEM and TEM observations showed that coatings with smaller bilayer periods tend to deform by shear sliding mechanism due to the existence of the long-grown columns, while short dispersed grains—growing in the coatings with a larger bilayer period—led to deformation via local grain boundary sliding and grain rotation.
机译:在这项研究中,研究了微观结构特性对使用不平衡反应磁控溅射PVD工艺沉积在Custom 450钢上的CrN / TiN多层涂层的变形和损伤机理的影响。所有涂层的总厚度为1.5μm,但双层周期(Λ)不同。通过XRD分析和纳米压痕实验分别研究了涂层的结构和力学性能。在涂层表面上分别以100、300和450 mN的三种载荷进行压痕测试,然后用SEM和TEM分析断裂的压痕的横截面。测量压痕载荷引起的裂纹的长度,并分析载荷-位移曲线,计算出多层涂层的表观断裂能值。我们观察到双层系统的双层周期为4.5–15 nm的多层系统具有超晶格结构,这也导致了更高的杨氏模量和硬度值以及更高的断裂能。横截面SEM和TEM观察结果的比较表明,由于长柱的存在,具有较小双层周期的涂层倾向于通过剪切滑动机制变形,而具有较短双层周期的涂层中生长的短分散颗粒则导致了这种现象。通过局部晶界滑动和晶粒旋转而变形。

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