Magnetic levitation ensures contactless transport for microchips

摘要

The manufacture of semiconductors and microchips demands an ultra-clean production environment; an inline vacuum deposition process is one example. However, the process of production, even in a vacuum, all too often lends to the creation of tiny contaminant particles, which can affect product quality and reduce the operational life of the end product. Particles are generated by metal-to-metal, or metal-to-grease contact that is commonly encountered with conventional methods of inline transport. Electronics manufacturers are currently using a variety of methods, from chain drives to conveyor belts with linear motors, that are complex, expensive and - crucially - particle generating. Typically, the layout includes a vacuum-sealed process chamber with the carrier inside a vacuum. The problem with this method is that the bearings are also inside the vacuum, resulting in metal-to-metal contact and the potential for particle contamination. And particles are not the only problem. This type of production is neither scalable nor flexible. Changes in production schedules cannot be quickly accommodated and the line will need extensive service and maintenance.