Gas storage with no added pressures

摘要

I azardous, toxic gases are frequently used in a number of semiconductor fabrication process steps in the microelectronics industry. Practical applications require that these gases be stored in, and delivered from, high-density media. Typically, this is accomplished by compressing or liquefying the material in conventional high pressure gas cylinders. While high pressure cylinders are still widely in use today for many gases, it is no longer the preferred method for storing and delivering the most toxic gases, where an accidental gas release or a compromised cylinder could lead to immediate death for workers in the vicinity.