SAVING ENERGY IN CLEANROOMS

摘要

Cleanrooms consume large amounts of energy - anything from 2 to 50 times more than is consumed by non-classified areas, depending on each specific application. In the past, little attention was paid to energy consumption and over-specification and over-designing of facilities, often based on normative documents or a poor interpretation of them, was common. Existing international standards tend to be general and do not reflect the specific features of cleanrooms. Detailed guidance on how to save energy in cleanrooms can be found in two national standards - the British standard BS 8568:2013 and the German VDI 2083 standard - but the issue is complex and not thoroughly investigated, therefore further efforts to understand energy consumption are required.