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Pressure Gradient Control and Energy-saving Operation Strategy Study on a Multi-zone Cleanroom

机译:多区域洁净室压力梯度控制和节能运行策略研究

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Pressure gradient control is an effective technical measure to prevent the external pollution and cross-contamination from different clean areas of a multi-zone cleanroom, which played a key role for the quality control of cleanroom. In this paper, modelling analysis combined with experimental investigations conducted on a multi-zone cleanroom experimental platform. A series of investigations were conducted on the experimental platform with supply air volume variation by electronic frequency conversion on air-supply fan unit. The characteristics of cleanroom such as cleanliness, ventilation rate, pressure gradient were all measured. An energy-saving operation strategy for multi-zone cleanroom has been gained. Experimental investigations proved that the determined principle of pressure gradient setting is feasible for reliable and energy-saving operation. It is also proved through experiments that about 24.5% energy consumption decreased when adopted the operation strategy.
机译:压力梯度控制是一种有效的技术措施,以防止来自多区洁净室的不同清洁区域的外部污染和交叉污染,这对洁净室的质量控制起关键作用。本文采用了多区净化机场实验平台进行的模拟分析。在试验平台上进行了一系列调查,通过供应空气供应风扇单元的电子频率转换供应空气体积变化。洁净室的特点如清洁,通风率,压力梯度都是测量的。已经获得了多区洁净室的节能运行策略。实验研究证明,确定的压力梯度设定原理是可靠和节能运行的可行性。通过实验还证明了,在采用了运作策略时,约24.5%的能量消耗减少。

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